Creative Design Of Wafer Transport Mechanism

02/07/2004 | Editor

By: Long-Chang Hsieh and Hsin-Sheng Lee

Long-Chang Hsieh and Hsin-Sheng Lee, jennifer@sunws.nhust.edu.tw Department of Power Mechanical Engineering, National Huwei University of Science and Technology Yunlin, TAIWAN

Abstract At present, the vacuum robot commonly used by semiconductor factories can be roughly … Read More