Creative Design Of Wafer Transport Mechanism

02/07/2004 | Editor

By: Long-Chang Hsieh and Hsin-Sheng Lee

Long-Chang Hsieh and Hsin-Sheng Lee, jennifer@sunws.nhust.edu.tw Department of Power Mechanical Engineering, National Huwei University of Science and Technology Yunlin, TAIWAN

Abstract At present, the vacuum robot commonly used by semiconductor factories can be roughly … Read More

The Conceptual Design Of A Fast Clasping Mechanism Based On Function Means Tree And TRIZ

21/10/2000 | Editor

By: Tan Runhua (School of Mechanical Engineering, Hebei University of Technology, Tianjin, 300130, P.R.China)

Abstract: Based on the analysis of users’ requirements, the objective tree for a fast clasping mechanism is developed. S-field analysis in TRIZ is used to … Read More